The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2009
Filed:
Jun. 29, 2007
Applicant:
SE Hoon Kim, Gunpo-si, KR;
Inventor:
Se Hoon Kim, Gunpo-si, KR;
Assignee:
Hynix Semiconductor Inc., Icheon-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a non-volatile memory device includes forming a conductive layer to form a gate on a semiconductor substrate; forming a hard mask over the conductive layer; patterning the hard mask and the conductive layer of a cell region to form the gate; partially recessing the hard mask using a mask through which a peripheral region is opened; and patterning the recessed hard mask and the conductive layer of the peripheral region to form the gate.