The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2009

Filed:

May. 03, 2006
Applicants:

Hyeon Jin Shin, Suwon-Si, KR;

Young Su Chung, Suwon-Si, KR;

Hyun Dam Jeong, Suwon-Si, KR;

Sang Heon Hyun, Suwon-Si, KR;

Jong Baek Seon, Seoul, KR;

Inventors:

Hyeon Jin Shin, Suwon-Si, KR;

Young Su Chung, Suwon-Si, KR;

Hyun Dam Jeong, Suwon-Si, KR;

Sang Heon Hyun, Suwon-Si, KR;

Jong Baek Seon, Seoul, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 35/24 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor thin film using a self-assembled monolayer (SAM) and a method for producing the semiconductor thin film are provided. According to the semiconductor thin film, a uniform inorganic seed layer is formed by using the self-assembled monolayer so that the adhesion between an insulating layer and a semiconductor layer is enhanced and thus the surface tension is reduced, thereby allowing the semiconductor thin film to have high quality without defects.


Find Patent Forward Citations

Loading…