The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2009
Filed:
Jun. 01, 2007
Applicants:
Ibrahim Abdullah Al-homoudi, Dearborn Heights, MI (US);
Golam Newaz, Ann Arbor, MI (US);
Gregory W. Auner, Livonia, MI (US);
Inventors:
Ibrahim Abdullah Al-Homoudi, Dearborn Heights, MI (US);
Golam Newaz, Ann Arbor, MI (US);
Gregory W. Auner, Livonia, MI (US);
Assignee:
Wayne State University, Detroit, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for producing a thin film titanium dioxide is disclosed. The disclosed method for producing the thin film titanium dioxide includes performing a magnetron reactive sputtering process to vaporize at least portions of a titanium source in a sputtering chamber that is supplied with gaseous oxygen. The vaporized titanium reacts with the oxygen to form anatase titanium dioxide, which is deposited on a substrate within the sputtering chamber.