The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2009

Filed:

Jul. 15, 2003
Applicants:

Mitsuru Ozono, Chikushino, JP;

Teruaki Kasai, Chikushino, JP;

Inventors:

Mitsuru Ozono, Chikushino, JP;

Teruaki Kasai, Chikushino, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

In an adhesive sheet exfoliation process in a pick-up operation for a thin-type chipadhered to the adhesive sheeta suction exfoliation toolprovided at its adhesion surfacewith plural suction groovesis abutted against the lower surface of the adhesive sheet. Then, air within the suction groovesare vacuum-sucked to bend and deform the adhesive sheettogether with the chipthereby to exfoliate the adhesive sheetfrom the lower surface of the chipdue to such bending deformation. Thus, it is possible to realize the picking-up operation with high productivity without causing a problem such as breakage or crack.


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