The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2009
Filed:
Dec. 18, 2006
Nobuki Yoshimatsu, Kawasaki, JP;
Takao Kusaka, Yokohama, JP;
Susumu Yasuda, Tsukuba, JP;
Junichi Seki, Yokohama, JP;
Nobuki Yoshimatsu, Kawasaki, JP;
Takao Kusaka, Yokohama, JP;
Susumu Yasuda, Tsukuba, JP;
Junichi Seki, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A scanning probe apparatus for obtaining information of a sample or processing the sample with relative movement between the sample and the apparatus includes a sample stage for holding the sample, and a drive stage with a probe, a cantilever supporting the probe, a cantilever holding member for holding the cantilever, and a drive element for driving the probe in three directions perpendicular to each other. In addition, a movable portion surrounds the drive element and is positioned outside of the drive element, with the movable portion movable in a direction in which an inertial force generated during movement of the probe is canceled. The drive stage includes an optical path, through which light passes, provided inside of the drive stage.