The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2009
Filed:
Aug. 24, 2006
Masao Miyamoto, Okayama, JP;
Masayuki Suzuki, Okayama, JP;
Masao Miyamoto, Okayama, JP;
Masayuki Suzuki, Okayama, JP;
Canon Semiconductor Equipment, Inc., Bando-shi, Ibaraki, JP;
Abstract
A flow analysis flow analysis system having a deaerator for removing gas bubbles in a liquid upstream an analysis section. The deaerator comprises a liquid-containing means variable in internal volume for containing the liquid together with gas bubbles included in the liquid; a liquid-introducing means for introducing the liquid into the liquid-containing means; a gas bubble-discharging means for discharging gas bubbles in the liquid-containing means by decreasing the internal volume of the liquid-containing means while maintaining in the liquid-containing means at least part of the liquid introduced by the liquid-introducing means; and a liquid delivery means for delivering to the analysis section the liquid in the liquid-containing means from which gas bubbles have been discharged by the gas bubble-discharging means.