The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2009

Filed:

Sep. 14, 2007
Applicants:

Miao-ju Chueh, Hsinchu, TW;

Pi-guey Su, Hsinchu, TW;

Yih-shiaw Huang, Hsinchu, TW;

I-cherng Chen, Hsinchu, TW;

Tung-sheng Shih, Hsinchu, TW;

Inventors:

Miao-Ju Chueh, Hsinchu, TW;

Pi-Guey Su, Hsinchu, TW;

Yih-Shiaw Huang, Hsinchu, TW;

I-Cherng Chen, Hsinchu, TW;

Tung-Sheng Shih, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
Abstract

A gas sensor is disclosed, which includes two separate metal electrodes on a surface of a substrate and a semiconductor thin film deposited on the surface of the substrate and connecting the two metal electrodes. The semiconductor thin film contains zinc oxide or a mixed oxide of zinc and indium, and the zinc oxide or the mixed oxide of zinc and indium are in the form of nanowires which constitute a gas-sensing surface of the semiconductor thin film. The nanowires have a diameter of 50-900 nm. The present invention also discloses a method for detecting the presence of a NOx gas.


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