The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2009
Filed:
Nov. 05, 2007
Anisur Rahman, Briarwood, NY (US);
Reginald Eze, Elmont, NY (US);
Sunil Kumar, Riverdale, NY (US);
Other;
Abstract
A novel optical sensor is used for monitoring the thickness of deposited thin film in real time. The sensor operates on the basic principle of a Fabry-Perot interferometer. A MEMS based design is used to fabricate the optical fiber sensor. Detail analytical results provide the theoretical model based on the Fabry-Perot interferometer, and show that the optical fiber sensor can successfully monitor and measure the thickness of deposited thin-film in real time. Since thin-film will be deposited simultaneously on both surfaces of sensor head and targeted silicon wafer, the sensor can be used in the fabrication of IC and MEMS devices, as well as in proteomics, nano-sensors, and biosensors.