The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 08, 2009

Filed:

Nov. 01, 2007
Applicant:

Seiki Aoyama, Toyohashi, JP;

Inventor:

Seiki Aoyama, Toyohashi, JP;

Assignee:

DENSO CORPORATION, Kariya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 9/04 (2006.01); G01P 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A physical quantity sensor includes: a substrate; a movable element; two fixed elements; a carrier wave application element for applying two carrier waves to the fixed elements; a signal application element for applying a middle voltage to the movable element; and a detection circuit for detecting a physical quantity. The detection circuit executes a first self diagnosis process when the signal application element further applies a first self diagnosis signal to the movable element. The first self diagnosis signal has a first frequency for obtaining a resonant magnification equal to or larger than 1.1 times with respect to a resonant frequency of the movable element, so that the movable element is resonated and almost contacts or press contacts one fixed element. The detection circuit determines whether a sticking phenomenon occurs when the signal application element applies the first self diagnosis signal.


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