The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2009
Filed:
Mar. 23, 2007
Cheon Soo Kim, Daejeon, KR;
Myung Shin Kwak, Daejeon, KR;
Seong DO Kim, Daejeon, KR;
Mun Yang Park, Daejeon, KR;
Hyun Kyu Yu, Daejeon, KR;
Hee Bum Jung, Daejeon, KR;
Cheon Soo Kim, Daejeon, KR;
Myung Shin Kwak, Daejeon, KR;
Seong Do Kim, Daejeon, KR;
Mun Yang Park, Daejeon, KR;
Hyun Kyu Yu, Daejeon, KR;
Hee Bum Jung, Daejeon, KR;
Electronics and Telecommunications Research Institute, Daejeon, KR;
Abstract
A coplanar waveguide CPW using multi-layer interconnection CMOS technology is provided. In the CPW including an interlayer insulator disposed on a substrate, metal multilayers disposed on the interlayer insulator, and a ground line-a signal line-a ground line formed of an uppermost metal layer, when a ground line of a lowermost layer is connected to the ground line of the uppermost layer, intermediate metal layers are designed to gradually increase or decrease in width, or to be uneven so as to maximize an area where an ultra-high frequency spreads, thereby minimizing CPW loss and maximizing a slow wave effect. As a result, it is possible to improve performance of an ultra-high frequency circuit and miniaturize the circuit.