The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2009
Filed:
Nov. 28, 2007
Yusuke Osada, Kanagawa, JP;
Tadahisa Shiono, Kanagawa, JP;
Yutaka Yabe, Kanagawa, JP;
Makoto Ito, Kanagawa, JP;
Yusuke Osada, Kanagawa, JP;
Tadahisa Shiono, Kanagawa, JP;
Yutaka Yabe, Kanagawa, JP;
Makoto Ito, Kanagawa, JP;
Showa Shinku Co., Ltd., Kanagawa, JP;
Abstract
An ion gunsupplies an Ar gas into a main bodyfrom a gas inlet, causes DC hot cathode discharge between a filamentand an anodeto generate Ar plasma. Next, a voltage gradient is applied to separated accelerator gridshaving a bi-separated configuration in an ion ejecting direction. The each potential of the separated accelerator gridsis independently controlled by independently setting accelerator control switcheson or off to change the potential of that of the separated accelerator gridswhich corresponds to an ion beam to be disabled.