The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2009
Filed:
Nov. 20, 2006
Akira Tokuhisa, Tokyo, JP;
Hitoshi Kawai, Tokyo, JP;
Yoshinori Oshita, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A fifth harmonic wave is formed from a fundamental wave of p-polarized light via a second harmonic wave forming optical element, a third harmonic wave forming optical element, and a fifth harmonic wave forming optical elementand a second harmonic wave of p-polarized light is formed from a fundamental wave of s-polarized light by a second harmonic wave forming optical element. The fifth harmonic wave of p-polarized light that is subjected to beam shaping by cylindrical lensesand, the fundamental wave of s-polarized light, and the second harmonic wave of p-polarized light are combined by a dichroic mirror, and are incident on a seventh harmonic wave forming optical element. Furthermore, a seventh harmonic wave of s-polarized light is formed from the second harmonic wave and fifth harmonic wave of p-polarized light, and this seventh harmonic wave is mixed with the fundamental wave of s-polarized light in an eighth harmonic wave forming optical element, so that an eighth harmonic wave of p-polarized light is formed. As a result, an eighth harmonic wave can be formed in a simpler optical system than a conventional optical system.