The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2009
Filed:
Apr. 05, 2005
In-sang Song, Seoul, KR;
Byeoung-ju Ha, Gyeonggi-do, KR;
Duck-hwan Kim, Gyeonggi-do, KR;
Yun-kwon Park, Gyeonggi-do, KR;
In-sang Song, Seoul, KR;
Byeoung-ju Ha, Gyeonggi-do, KR;
Duck-hwan Kim, Gyeonggi-do, KR;
Yun-kwon Park, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Abstract
A resonator having a membrane formed of a piezoelectric layer sandwiched between first and second electrode is suspended above a cavity formed from the back surface of the support structure. In one embodiment, the cavity walls are substantially perpendicular to the back surface. In another embodiment, the first electrode is formed in the cavity such that it is electrically connected to an electrode on the back surface of the support structure. In yet another embodiment, the cavity is formed via an etch through via holes in the back surface of the support structure, which leads to greater flexibility in designing a method of manufacture while reducing the need for alignment relative to other designs.