The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Sep. 30, 2005
Susan Hickey, Austin, TX (US);
Edward C. Stewart, Buda, TX (US);
Jason A. Grover, Austin, TX (US);
Cabe W. Nicksic, Austin, TX (US);
Susan Hickey, Austin, TX (US);
Edward C. Stewart, Buda, TX (US);
Jason A. Grover, Austin, TX (US);
Cabe W. Nicksic, Austin, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A method, apparatus and a system, for provided for performing an automated process flow adjustment. A semiconductor wafer is processed based upon a routing plan and a predetermined schedule. A fault detection relating to the processing of the semiconductor wafer is performed. Dynamically modifying the predetermined routing plan or the predetermined schedule based upon the fault detection. A predetermined process material delivery plan is dynamically modified based upon the modifying of the routing plan or modifying of the predetermined schedule.