The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Apr. 26, 2007
Dean R. Brown, Lynnwood, WA (US);
Wyatt O. Davis, Bothell, WA (US);
Jason B. Tauscher, Sammamish, WA (US);
David R. Bowman, Lynnwood, WA (US);
Dean R. Brown, Lynnwood, WA (US);
Wyatt O. Davis, Bothell, WA (US);
Jason B. Tauscher, Sammamish, WA (US);
David R. Bowman, Lynnwood, WA (US);
Microvision, Inc., Redmond, WA (US);
Abstract
Briefly, in accordance with one or more embodiments, a MEMS device may comprise a coil frame having a drive coil disposed thereon and being supported by one or more suspension arms disposed along an axis of the coil frame, and a mirror platform having a mirror disposed thereon. The mirror platform may be coupled to the coil frame at connection points generally disposed along the axis in order to reduce deflection of the mirror platform to reduce stress on the mirror in order to maintain the relative flatness of the mirror surface. Furthermore, the mirror platform may include flexible members disposed near an edge of the mirror platform generally along the axis to isolate the mirror platform and the mirror from warping of the coil frame and twist of the suspension arms to further maintain the relative flatness of the mirror.