The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Mar. 19, 2007
Mitsuo Nishimura, Kawasaki, JP;
Mitsuo Nishimura, Kawasaki, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A stage apparatus includes a movable stage; a magnetic unit including a first permanent magnet that is provided on the stage and magnetized in a direction perpendicular to a moving direction of the stage and at least one pair of second permanent magnets that are magnetized such that opposing portions of the first and second permanent magnets have the same pole. The magnetic unit applies a force to the stage in the moving direction thereof by placing the first permanent magnet between the pair of second permanent magnets. An actuator is configured to drive the second permanent magnets in the direction of magnetization. The force applied to the stage is varied by driving the actuator.