The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Feb. 13, 2006
Applicants:
Mitsunori Toyoda, Sendai, JP;
Naonori Kita, Ageo, JP;
Inventors:
Mitsunori Toyoda, Sendai, JP;
Naonori Kita, Ageo, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is disclosed an evaluation method for evaluating a one-dimensional illumination distribution using polynomials, the method comprising steps of: setting up, as the polynomials, one-dimensional power polynomials which are orthogonal in a closed interval; and approximating the one-dimensional illumination distribution with the power polynomials to obtain the coefficients of respective terms of the power polynomials.
Toyoda, Mitsunori. (2009). Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method (U.S. Patent No. 7618767). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7618767
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