The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Mar. 17, 2006
Ju-won Kim, ChonAn-shi, KR;
Doo-keun an, ChonAn, KR;
Kwang-il Choi, ChonAn-shi, KR;
Pyong-soon Jung, ChonAn-shi, KR;
Yong-nam Choi, ChonAn-shi, KR;
Jeong-yong Bae, ChonAn-shi, KR;
Ju-Won Kim, ChonAn-shi, KR;
Doo-Keun An, ChonAn, KR;
Kwang-Il Choi, ChonAn-shi, KR;
Pyong-Soon Jung, ChonAn-shi, KR;
Yong-Nam Choi, ChonAn-shi, KR;
Jeong-Yong Bae, ChonAn-shi, KR;
Semes Co., Ltd., ChungCheongNam-do, KR;
Abstract
A supply system for supplying a functional water to a process unit which treats a substrate using the functional water is provided. In the system, the functional water generated in the functional water generator is supplied to a distributor through a functional water supply pipe. Thereafter, the functional water is supplied to the process unit while the process unit performs a process, and the functional water is returned to the functional water generator through a functional water returning pipe while the process unit does not perform a process. A buffer tank is installed in the functional water supply pipe and the concentration of the functional water is measured in a circulation line connected with the buffer tank. When the measured concentration of the functional water goes out of a set concentration range, the functional water is returned to the functional water generator through functional water returning pipe.