The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Jun. 30, 2008
Applicants:
Hongxing Tang, Pasadena, CA (US);
MO LI, Pasadena, CA (US);
Michael L. Roukes, Pasadena, CA (US);
Inventors:
Assignee:
California Institute of Technology, Pasadena, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/16 (2006.01);
U.S. Cl.
CPC ...
Abstract
Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
Quick Actions:
Tang, Hongxing. (2009). Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes (U.S. Patent No. 7617736). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7617736
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile