The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Feb. 14, 2007
Applicants:
Noel Axelrod, Jerusalem, IL;
Eran Ofek, Modi'in, IL;
Inventors:
Noel Axelrod, Jerusalem, IL;
Eran Ofek, Modi'in, IL;
Assignee:
Physical Logic AG, Zug, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
Abstract
An accelerometer is fabricated as a MEMS device and includes an array of capacitive electrode plates mechanically coupled to a common proof mass. The proof mass is constrained to move or vibrate in the plane parallel to the first array of plates. The capacitance between the first array of plates is measured with respect to additional arrays of capacitive plates inter-digitated in a comb like pattern.