The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Jun. 20, 2007
Masahiro Matsumoto, Hitachi, JP;
Masamichi Yamada, Hitachinaka, JP;
Hiroshi Nakano, Hitachi, JP;
Keiji Hanzawa, Mito, JP;
Yasuhiro Kanamaru, Yokohama, JP;
Masahiro Matsumoto, Hitachi, JP;
Masamichi Yamada, Hitachinaka, JP;
Hiroshi Nakano, Hitachi, JP;
Keiji Hanzawa, Mito, JP;
Yasuhiro Kanamaru, Yokohama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The coupling capacitance of the wiring portions of a thermal type flow rate measuring apparatus is reduced so as to prevent a drop in the response characteristics. A detection element of the thermal type flow rate measuring apparatus includes a planar substrate made of silicon, ceramic, or the like, in which a diaphragm is formed. On the surface of the diaphragm, there are disposed a heat-generating resistor as a heat-generating element that is heated to a predetermined temperature difference from the temperature of air flow to be measured, a heat-generating element temperature-detecting resistor for detecting the temperature of the heat-generating resistor, and temperature-detecting resistors disposed on both sides of the heat-generating resistor. The detection element also includes wiring portions which have connecting terminals electrically connected to the heat-generating resistor and a wiring pattern electrically connected with the surface of the planar substrate.