The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Feb. 16, 2007
Burtis Khuri-yakub, Palo Alto, CA (US);
Arif Sanli Ergun, Mountain View, CA (US);
G. Göksenin Yaralioglu, Mountain View, CA (US);
Yongli Huang, San Jose, CA (US);
Sean Hansen, Sunnyvale, CA (US);
Burtis Khuri-Yakub, Palo Alto, CA (US);
Arif Sanli Ergun, Mountain View, CA (US);
G. Göksenin Yaralioglu, Mountain View, CA (US);
Yongli Huang, San Jose, CA (US);
Sean Hansen, Sunnyvale, CA (US);
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Abstract
Structure for capacitive micromachined ultrasonic transducer (CMUT) device or other vibrating membrane device having non-uniform membrane so that membrane mass and stiffness characteristics may be substantially independently adjusted. CMUT having trenched membrane and/or membrane with non-uniform thickness or density. Method for operating transducer or vibrating membrane device. Array of devices at least some of which have non-uniform membrane properties. CMUT comprising substrate, support for membrane, and membrane extending over support to create cavity, membrane having non-uniform membrane thickness resulting from at least one of: thickening on upper surface of the membrane outside of cavity, thickening on lower surface of membrane inside cavity, trench on upper surface of membrane, trench on lower surface of the membrane, and any combination of two or more of these. Method for fabricating CMUT or vibrating membrane device having non-uniform membrane. High mechanical sensitivity transducer for sensor, microphone, and/or transmitter.