The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Dec. 08, 2005
Applicants:
Geun Su Lee, Yongin-si, KR;
Seung Chan Moon, Yongin-si, KR;
Seung Hun Lee, Daegugwangyeok-si, KR;
Inventors:
Assignees:
Hynix Semiconductor Inc., Icheon-shi, KR;
Youngchang Chemical Co., Ltd., Daegugwangyeok-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C 1/73 (2006.01); G03F 7/26 (2006.01); G03F 7/36 (2006.01);
U.S. Cl.
CPC ...
Abstract
A photoresist coating composition that includes a compound represented by Formula 1 and an aqueous solvent, and a method for forming a fine pattern by coating the composition on a photoresist pattern to effectively reduce a size of a photoresist contact hole and a space, which can be applied to all semiconductor processes.