The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Dec. 21, 2005
Ji NO Lee, Goyang-Si, KR;
Ji No Lee, Goyang-Si, KR;
LG Display Co., Ltd., Seoul, KR;
Abstract
The present application relates to a method of fabricating a display device, including the steps of forming at least one to-be-patterned material layer on a substrate and forming a photo-resist layer on the at least one to-be-patterned material layer, providing a halftone mask including light transmission parts for transmitting light, shielding parts, in which shielding patterns for intercepting the light are formed, and a halftone transmission part, in which a first halftone transmission pattern for transmitting an amount of the light that is less than an amount of an incident light and a second halftone transmission pattern formed on the first halftone transmission pattern for transmitting an amount of the light that is less than the amount of the incident light are formed, exposing the photo-resist layer to the light through the halftone mask, developing the photo-resist layer to form a photo-resist pattern on the at least one to-be-patterned material layer on the subststrate, wherein the photo-resist pattern has three different heights, and patterning the at least one to-be-patterned material layer by an etching process and an ashing process using the photo-resist pattern, and wherein a width of the second halftone transmission pattern is narrower than a width of the first halftone transmission pattern.