The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Oct. 18, 2005
Applicants:
Kyle Patterson, Froges, FR;
Yves Rody, La Terrasse, FR;
Christophe Couderc, Saint-Nazaire, FR;
Corinne Miramond-collet, Saint Martin, FR;
Inventors:
Kyle Patterson, Froges, FR;
Yves Rody, La Terrasse, FR;
Christophe Couderc, Saint-Nazaire, FR;
Corinne Miramond-Collet, Saint Martin, FR;
Assignees:
Freescale Semiconductor Inc., Austin, TX (US);
STMicroelectronics (Crolles 2) SAS, Crolles, FR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
For cases where one edge of a design feature is to be printed through a shifter mask and another one is to be printed through a binary trim mask, and where no upsizing can be performed due to the local density of the design, it is proposed to add shifters with respect to the shifter mask in such a way that all the edges are printed by the phase shift mask.