The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Dec. 10, 2002
Giacomo Nicolao Maccalli, Milan, IT;
Gianluca Valente, Milan, IT;
Olle Kordina, Oldsmar, FL (US);
Franco Preti, Milan, IT;
Danilo Crippa, Novara, IT;
Giacomo Nicolao Maccalli, Milan, IT;
Gianluca Valente, Milan, IT;
Olle Kordina, Oldsmar, FL (US);
Franco Preti, Milan, IT;
Danilo Crippa, Novara, IT;
E.T.C. Epitaxial Technology Center SRL, Catania, IT;
Abstract
The present invention relates to a susceptor system for an apparatus of the type adapted to treat substrates and/or wafers; the susceptor system is provided with a cavity () which acts as a chamber for the treatment of the substrates and/or wafers and which extends in a longitudinal direction and is delimited by an upper wall (), by a lower wall (), by a right-hand side wall (), and by a left-hand side wall (); the upper wall () is constituted by at least one piece of electrically conducting material suitable for being heated by electromagnetic induction; the lower wall () is constituted by at least one piece of electrically conducting material suitable for being heated by electromagnetic induction; the right-hand side wall () is constituted by at least one piece of inert, refractory and electrically insulating material; the left-hand side wall () is constituted by at least one piece of inert, refractory and electrically insulating material; the piece of the upper wall () is thus electrically well insulated from the piece of the lower wall ().