The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Jun. 07, 2007
Robert D. Tolles, San Jose, CA (US);
Norman Shendon, San Carlos, CA (US);
Sasson Somekh, Los Altos Hills, CA (US);
Ilya Perlov, Santa Clara, CA (US);
Eugene Gantvarg, Santa Clara, CA (US);
Harry Q. Lee, Los Altos, CA (US);
Robert D. Tolles, San Jose, CA (US);
Norman Shendon, San Carlos, CA (US);
Sasson Somekh, Los Altos Hills, CA (US);
Ilya Perlov, Santa Clara, CA (US);
Eugene Gantvarg, Santa Clara, CA (US);
Harry Q. Lee, Los Altos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A chemical-mechanical polishing apparatus including a table top, a transfer station mounted on the table top, a plurality of polishing stations mounted on the table top, a plurality of washing stations, and a plurality of carrier heads supported by a support member rotatable about an axis. Each washing station is located between a first polishing station and either a second polishing station or the transfer station, and the transfer station and the plurality of polishing stations are arranged at approximately equal angular intervals about the axis.