The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Jun. 26, 2007
Applicant:
Wataru Nakagawa, Tokyo, JP;
Inventor:
Wataru Nakagawa, Tokyo, JP;
Assignee:
Adtec Engineering Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 5/00 (2006.01); A61B 6/08 (2006.01); G01N 23/083 (2006.01);
U.S. Cl.
CPC ...
Abstract
X-rays are irradiated at the boardfrom the X-ray generatorthe image of the standard marksare projected on the fluorescence screenthe resulted image is photographed simultaneously by one shot of the visible light CCD cameraand finally processed by the control deviceto simultaneously determine the position of the standard marksandthe alignment marks depicted on the photo masksandare imprinted on the dry film resist layersrespectively based on the positions of the standard marksandby irradiating X-rays through the sets of mirrorson the dry film resist layers