The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Mar. 20, 2006
Tomoyoshi Abe, Tokyo, JP;
Tomoyoshi Abe, Tokyo, JP;
Kabushiki Kaisha Topcon, Itabashi-Ku, JP;
Abstract
An optical image measuring apparatus capable of speedily starting image measurement in response to a measurement start request and performing image measurement on a region on which focus is achieved at determination of an image region. When observation light (M) is focused on an observation CCD camera (), measurement CCD cameras () are disposed to have a measurement object point (Q) in a position shifted from point (P) to an apparatus side. In response to a measurement start switch (), an interferometer moving stage () is moved to adjust an optical path length difference, thereby shifting the point (Q) to the point (P). The distance (d) is set to equal to or longer than necessary to move the interferometer moving stage () which accelerates a moving speed thereof to a predetermined speed. Thereby, image measurement can speedily start in response to request for image measurement of an object (O). It is possible to perform image measurement on the region where focus is achieved at the time of determination of the measurement region, i.e., at the position of the point (P).