The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2009
Filed:
Jul. 26, 2007
Tae-kyong Hwang, Gyeonggi-do, KR;
Myung Keun Noh, Seoul, KR;
Heaung Shig OH, Gyeonggi-do, KR;
LOT Vacuum Co., Ltd., , KR;
Abstract
A complex dry vacuum pump including a root rotor and a screw rotor is disclosed for manufacturing semiconductors and/or displays in a vacuum state in a process chamber, and discharging gaseous material and/or by-products generated during manufacturing to the exterior of the process chamber. The pump can provide high gas compression transfer efficiency so as to form a vacuum in the process chamber and/or keep high gas compression transfer efficiency when the gaseous material and/or by-products are discharged. Balance between the root rotor and the screw rotor can prevent vibration and noise generated in the vacuum pump, and molding material associated with the pump may allow a stator coil to be separated and prevent various by-products from flowing from the vacuum pump.