The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2009
Filed:
Aug. 31, 2005
Applicants:
Terry Bluck, Santa Clara County, CA (US);
Stuart Scollay, Santa Clara County, CA (US);
Edric Tong, Santa Clara County, CA (US);
Inventors:
Terry Bluck, Santa Clara County, CA (US);
Stuart Scollay, Santa Clara County, CA (US);
Edric Tong, Santa Clara County, CA (US);
Assignee:
Intevac, Inc., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B65H 1/00 (2006.01); H01L 21/677 (2006.01); C23F 1/00 (2006.01); C23C 16/00 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing.