The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2009
Filed:
Nov. 02, 2005
Robert Christian Cox, St. James, MO (US);
Charles J. Neef, Rolla, MO (US);
Robert Christian Cox, St. James, MO (US);
Charles J. Neef, Rolla, MO (US);
Brewer Science Inc., Rolla, MO (US);
Abstract
Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers are copolymers of a compound having the formulas where: (1) each R is individually selected from the group consisting of —OH, —NH, hydrogen, aliphatics, and phenyls; and (2) L is selected from the group consisting of —SO— and —CR'—. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.