The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2009

Filed:

Oct. 05, 2005
Applicants:

Koji Kuno, Hamamatsu, JP;

Tatsuya Suzuki, Hamamatsu, JP;

Inventors:

Koji Kuno, Hamamatsu, JP;

Tatsuya Suzuki, Hamamatsu, JP;

Assignee:

Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/268 (2006.01);
U.S. Cl.
CPC ...
Abstract

To provide a laser processing method which can highly accurately cut a planar object to be processed having an irregular surface as an entrance surface for processing laser light. This laser processing method irradiates a planar object to be processed with laser light while locating a light-converging point within the object, thereby forming modified regionstoto become a starting point region for cutting along lines to cut. The entrance surface r for the laser light in the object is an irregular surface. The lines to cutextend over a depressed area surface rand a protruded area surface rin the entrance surface r. The modified regionis formed inside by a predetermined distance from the depressed area surface r. At the time of irradiation with laser light along a parton the protruded area surface r, the light-converging point is located on the outside of the object. The modified regionis formed inside by a predetermined distance from the protruded area surface r. At the time of irradiation with laser light along a parton the depressed area surface r, the light-converging point is located on the outside of the object.


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