The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2009
Filed:
May. 17, 2005
Katsuhiko Miya, Kyoto, JP;
Koji Ando, Kyoto, JP;
Katsuhiko Miya, Kyoto, JP;
Koji Ando, Kyoto, JP;
Abstract
In the vicinity of a rim portion of a spin base, a plurality of supportswhich abut on a bottom rim portion of a substrate W and support the substrate W are formed projecting toward above from the spin base. The substrate W is supported horizontally by the plurality of supports, with a predetermined distance ensured from the spin basewhich opposes the bottom surface of the substrate W. Into the space which is created between the top surface of the substrate W and an opposing surfaceof an atmosphere blocker plate, inert gas is ejected from a plurality of gas ejection outletswhich are formed in the opposing surface. The inert gas thus supplied to the top surface of the substrate W presses the substrate W against the supportsand the substrate W is held at the spin base