The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2009
Filed:
Jun. 15, 2005
Daniel A. Hall, West Newbury, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
William Fosnight, Carlisle, MA (US);
Robert T. Caveney, Windham, NH (US);
Ulysses Gilchrist, Reading, MA (US);
Jeff G. Araujo, Tyngsboro, MA (US);
Daniel A. Hall, West Newbury, MA (US);
Christopher Hofmeister, Hampstead, NH (US);
William Fosnight, Carlisle, MA (US);
Robert T. Caveney, Windham, NH (US);
Ulysses Gilchrist, Reading, MA (US);
Jeff G. Araujo, Tyngsboro, MA (US);
Brooks Automation, Inc., Chelmsford, MA (US);
Abstract
A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.