The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2009
Filed:
Feb. 06, 2004
Jon W. Lai, Santa Barbara, CA (US);
Thomas W. Tombler, Jr., Santa Barbara, CA (US);
Brian Y. Lim, Santa Barbara, CA (US);
Jon W. Lai, Santa Barbara, CA (US);
Thomas W. Tombler, Jr., Santa Barbara, CA (US);
Brian Y. Lim, Santa Barbara, CA (US);
Atomate Corporation, Simi Valley, CA (US);
Abstract
Solutions permit or facilitate faster and/or easier processing involving loading or unloading of a work module into a process station. For example, the work module may be a processing tube or the like and the process station may be a heating station such as a tube furnace or the like. In one embodiment, the loading is from a single side of a process station. In one embodiment, the work module includes inlets and outlets for fluid flow, with both inlets and outlets being closer toward one side of the work module than the other side.