The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2009
Filed:
Jul. 11, 2005
Paul Newman, Milpitas, CA (US);
Rocco D. Pochy, Milpitas, CA (US);
Morgan Polen, Milpitas, CA (US);
Scott H. Salton, Fremont, CA (US);
Thomas C. Saunders, Milpitas, CA (US);
Paul Newman, Milpitas, CA (US);
Rocco D. Pochy, Milpitas, CA (US);
Morgan Polen, Milpitas, CA (US);
Scott H. Salton, Fremont, CA (US);
Thomas C. Saunders, Milpitas, CA (US);
Lighthouse Worldwide Solutions, Inc., San Jose, CA (US);
Abstract
A device that fits inside a transport pod communicating with the slots of the transport pod so that the device can be inserted and removed from the transport pod. The transport pods are for silicon wafers. The device has sensors that monitor the environment within the transport pod. Depending on the device's size, silicon wafers may be able to accompany the device so that the device can monitor the precise environment the silicon wafers are exposed to while inside the transport pod. The device may also be placed in a transport pod and run through the manufacturing process as one transport pod in a series. The results on the environmental monitoring can be used for alarms and monitoring or data logging to improve the yield of the silicon wafers.