The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2009
Filed:
Dec. 09, 2003
Applicants:
Zhiyun Chen, Alexandria, VA (US);
Gregory D. Cooper, Vienna, VA (US);
Serpil Gönen, College Park, MD (US);
Erin F. Fleet, Springfield, VA (US);
Inventors:
Zhiyun Chen, Alexandria, VA (US);
Gregory D. Cooper, Vienna, VA (US);
Serpil Gönen, College Park, MD (US);
Erin F. Fleet, Springfield, VA (US);
Assignee:
Pixelligent Technologies LLC, College Park, MD (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0264 (2006.01);
U.S. Cl.
CPC ...
Abstract
Nano-particles are provided with control circuitry to form a programmable mask. The optical characteristics of the nano-particles change to provide patterned light. Such patterned light can be used for example to expose a photoresist on a semiconductor wafer for photolithography.