The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2009

Filed:

Jun. 10, 2005
Applicants:

Masaki Taniguchi, Hyogo, JP;

Hisatada Yasukawa, Kyoto, JP;

Takaki Iwai, Osaka, JP;

Ryoichi Ito, Kyoto, JP;

Inventors:

Masaki Taniguchi, Hyogo, JP;

Hisatada Yasukawa, Kyoto, JP;

Takaki Iwai, Osaka, JP;

Ryoichi Ito, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 21/311 (2006.01); G02B 6/36 (2006.01);
U.S. Cl.
CPC ...
Abstract

A transistor that forms an integrated circuit, a photo detector and a micromirror are mounted on the same semiconductor substrate in an optical semiconductor device of the present invention, which has an antireflection film that is formed on the photo detector, a first insulating film which is formed on the antireflection film and in which an opening is created in the state where the antireflection film is exposed, and an etching stopping film which is formed on the first insulating film and which has been left in the periphery around the opening in the first insulating film on the antireflection film and in the periphery around the portion above the micromirror.


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