The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7605026 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 20, 2009

Filed:

Dec. 03, 2007
Applicants:

Chan-long Shieh, Paradise Valley, AZ (US);

Hsing-chung Lee, Calabasas, CA (US);

Inventors:

Chan-Long Shieh, Paradise Valley, AZ (US);

Hsing-Chung Lee, Calabasas, CA (US);

Assignee:

CBRITE, Inc., Goleta, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of fabricating self-aligned metal oxide TFTs on transparent flexible substrates is disclosed and includes the steps of providing a transparent flexible substrate with at least an opaque first metal TFT electrode in a supporting relationship on the front surface of the substrate and a layer of transparent material, including at least one of a metal oxide semiconductor and/or a gate dielectric, on the front surface of the substrate and the first metal TFT electrode. A layer of photoresist is positioned in overlying relationship to the layer of transparent material. Dual photo masks are positioned over the front and rear surfaces of the substrate, respectively, and the layer of photoresist is exposed. The layer of photoresist is developed and used to form a layer of second metal.


Find Patent Forward Citations

Shieh, Chan-Long. (2009). Self-aligned transparent metal oxide tft on flexible substrate (U.S. Patent No. 7605026). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7605026

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