The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2009
Filed:
Dec. 18, 2007
Akihiro Koga, Tokyo, JP;
Masayuki Sekimura, Chofu, JP;
Kei Masunishi, Kawasaki, JP;
Akio Kobayashi, Sano, JP;
Hiroyuki Kawashima, Warabi, JP;
Hirotake Maruyama, Saitama, JP;
Akihiro Koga, Tokyo, JP;
Masayuki Sekimura, Chofu, JP;
Kei Masunishi, Kawasaki, JP;
Akio Kobayashi, Sano, JP;
Hiroyuki Kawashima, Warabi, JP;
Hirotake Maruyama, Saitama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
It is made possible to improve the variations in the 'generated force (load)—deflection characteristics'. A deformable mirror device includes: a substrate; a plurality of electrodes provided on the substrate; a spacer disposed on the substrate; a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face; a first insulation film provided on the first face of the support member; a second insulation film provided on the second face of the support member; and a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film. The electrode film includes a reflection portion on a face opposite from the electrodes, and the support member is disposed on the substrate with sandwiching the electrode film, the first insulation film and the spacer.