The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2009
Filed:
Jul. 27, 2007
Applicant:
Yoshikazu Miyajima, Utsunomiya, JP;
Inventor:
Yoshikazu Miyajima, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03B 27/42 (2006.01); G03B 27/62 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate holding apparatus which contacts an undersurface of a substrate and holds the substrate, at least a portion of a top surface of the substrate being immersed in liquid. The apparatus includes a chuck unit for supporting the substrate, and a groove, arranged along an outer periphery of a substrate supporting surface of the chuck unit, for storing a fluorinated inert refrigerant, fluorinated oil or a gelatinous polymer material.