The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2009

Filed:

May. 09, 2007
Applicants:

Benjamin M. Johnston, Los Gatos, CA (US);

Sriram Krishnaswami, Saratoga, CA (US);

Hung T. Nguyen, Fremont, CA (US);

Matthias Brunner, Kirchheim, DE;

Yong Liu, San Jose, CA (US);

Inventors:

Benjamin M. Johnston, Los Gatos, CA (US);

Sriram Krishnaswami, Saratoga, CA (US);

Hung T. Nguyen, Fremont, CA (US);

Matthias Brunner, Kirchheim, DE;

Yong Liu, San Jose, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01R 31/00 (2006.01); G01R 31/26 (2006.01); G01R 31/28 (2006.01); G02F 1/133 (2006.01);
U.S. Cl.
CPC ...
Abstract

An apparatus and method for testing large area substrates is described. The large area substrates include patterns of displays and contact points electrically coupled to the displays. The apparatus includes a prober assembly that is movable relative to the large area substrate and may be configured to test various patterns of displays and contact points. The prober assembly is also configured to test fractional sections of the large area substrate. The apparatus also includes a test chamber configured to store at least two prober assemblies within an interior volume.


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