The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2009
Filed:
Nov. 16, 2006
Markus Zundel, Egmating, DE;
Franz Hirler, Isen, DE;
Rudolf Zelsacher, Klagenfurt, AT;
Erwin Bacher, Villach, AT;
Markus Zundel, Egmating, DE;
Franz Hirler, Isen, DE;
Rudolf Zelsacher, Klagenfurt, AT;
Erwin Bacher, Villach, AT;
Infineon Technologies Austria AG, Villach, AT;
Abstract
According to one embodiment, a method for manufacturing a semiconductor device includes forming trenches in a first side of a semiconductor material and forming a thick oxide layer on the trenches and on the first side. A part of the first side and the trenches is masked using a first mask, and the semiconductor material is doped by implantation through the thick oxide layer while the first mask is present. At least part of the thick oxide layer is removed while the first mask remains.