The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2009
Filed:
May. 19, 2005
Kwang-soo Kim, Yongin-si, KR;
Koung-su Shin, Suwon-si, KR;
Seung-min Choi, Suwon-si, KR;
Yu-han Jeong, Suwon-si, KR;
Kwang-soo Kim, Yongin-si, KR;
Koung-su Shin, Suwon-si, KR;
Seung-min Choi, Suwon-si, KR;
Yu-han Jeong, Suwon-si, KR;
Samsung Electronics Co., Ltd, Suwon-si, KR;
Abstract
A wafer inspection system includes an electrical testing part to control a probe to be in contact with a pad of a wafer to perform a predetermined electrical test, a defect detecting part to detect a defect in the wafer passing through the electrical test, a defect sorting part to sort the defect detected in the defect detecting part by an in-line method, and a defective determining part to determine whether the wafer is a defective according to a sorting result of the defect sorting part. The wafer inspection system and a method thereof can determine the kinds of the defect in the wafer during a fabricating procedure, so that it is possible to instantly and correctly determine whether the die on the wafer is a defective.