The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 06, 2009
Filed:
Sep. 19, 2006
Nestor P. Murphy, West Bloomfield, MI (US);
David E. Rock, Sylvania, OH (US);
Hugh A. Walton, Holly, MI (US);
Maximo Frati, Ypsilanti, MI (US);
Nestor P. Murphy, West Bloomfield, MI (US);
David E. Rock, Sylvania, OH (US);
Hugh A. Walton, Holly, MI (US);
Maximo Frati, Ypsilanti, MI (US);
Guardian Industries Corp., Auburn Hills, MI (US);
Abstract
An ion source is capable of generating and/or emitting an ion beam which may be used to deposit a layer on a substrate or to perform other functions. In certain example embodiments, techniques for reducing the costs associated with producing ion sources and/or elements thereof are provided. Such techniques may include, for example, forming the inner and/or outer cathode(s) from 1018 mild steel and/or segmented pieces. Such techniques also or instead include, for example, forming the ion source body from a single steel U-channel, or from segmented pieces making up the same. These techniques may be used alone or in various combinations.