The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7596841 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 06, 2009

Filed:

Apr. 23, 2004
Applicants:

Kui Yao, Singapore, SG;

Xiao Song Eric Tang, Singapore, SG;

Peng Gao, Singapore, SG;

Xujiang He, Singapore, SG;

Jian Zhang, Singapore, SG;

Santiranjan Shannigrahi, Singapore, SG;

Inventors:

Kui Yao, Singapore, SG;

Xiao Song Eric Tang, Singapore, SG;

Peng Gao, Singapore, SG;

Xujiang He, Singapore, SG;

Jian Zhang, Singapore, SG;

Santiranjan Shannigrahi, Singapore, SG;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/22 (2006.01); H01L 41/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An electromechanical device includes a support structure formed by attaching inner surfaces of second and third substrates to a first substrate. The support structure includes at least one cavity between the second and third layers. An electromechanical active element is provided on an outer surface of at least one of the second or third layers.


Find Patent Forward Citations

Yao, Kui. (2009). Micro-electromechanical devices and methods of fabricating thereof (U.S. Patent No. 7596841). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7596841

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