The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2009
Filed:
Jun. 01, 2007
Applicants:
Markus Lutz, Palo Alto, CA (US);
Aaron Partridge, Palo Alto, CA (US);
Zhiyu Pan, Mountain View, CA (US);
Inventors:
Markus Lutz, Palo Alto, CA (US);
Aaron Partridge, Palo Alto, CA (US);
Zhiyu Pan, Mountain View, CA (US);
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/46 (2006.01);
U.S. Cl.
CPC ...
Abstract
A MEMS array structure includes MEMS resonators that form an array. Each MEMS resonator includes beam sections. At least one of the beam sections of a first one of the MEMS resonators is a shared beam section that is also included in another of the MEMS resonators adjacent to the first MEMS resonator.