Radiation detecting apparatus, manufacturing method thereof, scintillator panel and radiation detecting system

Abstract

A radiation detecting apparatus includes a sensor panel, a phosphor layerformed on the sensor panelto convert a radiation into light, and a phosphor protecting membercovering the phosphor layerto adhere closely to the phosphor protecting member. The phosphor protecting memberincludes a phosphor protecting layermade of vapor deposition polymerization polyimide formed by vapor deposition polymerization, a reflecting layerreflecting the light converted by the phosphor layer, and a protecting layermade of vapor deposition polymerization polyurea formed by the vapor deposition polymerization. By such a configuration, a polymerization reaction of the phosphor protecting layeris performed on the substrate. Thereby, the generation of by-products is suppressed to make it easy to acquire the uniformity of film quality. Consequently, the generation of a situation in which structural disorders are generated on the reflection surface of the reflecting layerto cause image defects can be suppressed.