The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 29, 2009

Filed:

Apr. 02, 2004
Applicant:

Alastair Robert Buckley, Sheffield, GB;

Inventor:

Alastair Robert Buckley, Sheffield, GB;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method and apparatus for depositing material on a substrate is provided in which material () is deposited on a substrate () by arranging the material in a container (), and contacting the surface of the material () with a beam of electrons so as to evaporate the material and transfer it to the substrate. A shield () opaque to electrons is arranged to cover a portion of the surface contacted by the beam of electrons. Relative movement occurs between the container () on one hand and the shield () and the beam of electrons on the other hand such that the portion of the surface previously contacted by the beam of electrons is no longer covered by the shield and is exposed to the substrate ().


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